XMA-16A-M9NA-XQ1A SMC868148XMA16AM9NAXQ1A

XM and XY, High Vacuum Valves, Stainless Steel, Angle and In-line Types; Angle or in-line type; SCS 13 body material (conforms to SUS304); A precision casting, unified composition prevents accumulation of gas; More than 2 million cycles service life (air operated valve); Light weight and compact; Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal); Flange Size: 16; Flange Type: KF (NW); Port Direction: A (w/Indicator, Flange Side; w/Indicator, Rear Flange Surface); Temperature: 5 to 60°C (5 to 150°C for XMH/XYH); Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal; Number: A [2 pcs (Valve Open/Closed)]; Seal Material: XQ1 (Kalrez® 4079); Seal Replacement: A (2, 3)

Connection method
05 M (Or None in the Case of No Auto Switch)